| 摘要 |
The present invention relates to a vacuum coating film drying system in a tensionless state and a dry method, for heating and drying, in a vacuum state, a film in which various materials are coated in various deposition manners, and, more specifically, to the vacuum coating film drying system in the tensionless state and the dry method, which are complemented to remove a damage of a coating thin film which is able to be generated at the time of heating in a tension state, as a device for heating, in the tensionless state, a film coated with film dry equipment separately included besides depositing equipment. The vacuum coating film drying system in the tensionless state comprises: an unwinding part (110) in which the film is wound; a winding part (120) in which the film is wound after dying; two tension insulating rollers (131, 133) which separate a tension section from a tensionless section; a rip roller (140) mounted on one side of the tension insulating roller, which attaches the film to the insulating roller; a heating apparatus (150), a cooling part (160), and a heat coupler (180), which heating and cooling process the film having the tensionless state; and a plasma source (170) for a surface treatment and cleaning of the film. |
