发明名称 Polysilicon thin film and manufacturing method thereof, array substrate and display device
摘要 <p>There are disclosed a polysilicon thin film and a manufacturing method thereof, an array substrate and a display device. The manufacturing method of the polysilicon thin film comprises the following steps: forming a graphene layer and an amorphous silicon layer which are adjacent; forming polysilicon by way of crystallizing amorphous silicon so as to obtain the polysilicon thin film. The polysilicon thin film manufactured by the method possesses good characteristics.</p>
申请公布号 EP2713401(B1) 申请公布日期 2015.05.06
申请号 EP20130174324 申请日期 2013.06.28
申请人 BOE TECHNOLOGY GROUP CO., LTD. 发明人 SUN, TUO
分类号 H01L21/02;H01L27/12;H01L29/66;H01L29/786 主分类号 H01L21/02
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