发明名称 Method and device for alignment of an optical imaging system
摘要 An optical imaging system (12) is to be aligned with its optical axis (16) in relation to a given alignment axis (14). For this, a radiation beam (30) is emitted from one side of the imaging system (12) along the alignment axis (14). In the direction of beam propagation, there is located behind the imaging system (12) a pair of diaphragm elements (24, 26), whose apertures are each covered by a piece of material transparent to the radiation, carrying a plurality of sensor elements arranged in a matrix. The sensor elements furnish information about the measured radiation intensity to a signal processing unit (42), which can graphically illustrate the current alignment status of the imaging system (12) on a monitor (44) and/or produce an automatic adjustment of the imaging system (12).
申请公布号 EP2869022(A1) 申请公布日期 2015.05.06
申请号 EP20140003721 申请日期 2014.11.05
申请人 WAVELIGHT GMBH 发明人 SCHMID, STEFAN
分类号 G01B21/00;G01B9/00;G01B11/02 主分类号 G01B21/00
代理机构 代理人
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