MANUFACTURING METHOD OF ALUMINIUM NITRIDE POWDER FOR SINGLE CRYSTAL GROWING AND ALUMINIUM NITRIDE POWDER

摘要

In the present invention, provided is a manufacturing method of aluminium nitride powders whose particle size is no less than 10 μm and purity is 99.9 %, comprising the steps of (a) offering aluminium nitride powders whose average particle size is less than 5 μm to the inside of a furnace; (b) reducing the inside pressure of the furnace to a first pressure which is less than atmospheric pressure and closing the furnace; (c) a first heat treatment step of maintaining the inside temperature of the furnace in a reduced state as a first temperature; and (d) a second treatment step in which the inside temperature of the furnace is decreased to a second temperature which is lower than the first temperature, thereby growing the aluminium nitride powders as particles where the manufactured aluminium nitride powder has high purity and a big particle size which is proper for single crystal growth.