Micromachined piezoelectric three-axis gyroscope and stacked lateral overlap transducer (slot) based three-axis accelerometer

摘要

This disclosure provides systems, methods and apparatus, including computer programs encoded on computer storage media, for making and using x-axis gyroscopes, y-axis gyroscopes, z-axis gyroscopes, two-axis accelerometers and three-axis accelerometers. Combining fabrication processes for such devices can enable the monolithic integration of six inertial sensing axes on a single substrate, such as a single glass substrate. Such devices may be included in a mobile device, such as a mobile display device.

主权项

1. An apparatus, comprising:
a substrate extending substantially in a first plane; a first plurality of electrodes formed substantially along a first axis on the substrate; a second plurality of electrodes formed substantially along a second axis on the substrate; a first central anchor attached to the substrate; a frame attached to the first central anchor and extending substantially in a second plane, the frame being substantially constrained for motion along the second axis; and a first proof mass attached to the frame and extending substantially in the second plane, the first proof mass having a first plurality of slots extending along the first axis and a second plurality of slots extending along the second axis, the first proof mass being conductive and being substantially constrained for motion along the first axis and along the second axis, wherein a lateral movement of the first proof mass in response to an applied lateral acceleration along the first axis results in a first change in capacitance at the second plurality of electrodes, wherein a lateral movement of the first proof mass in response to an applied lateral acceleration along the second axis results in a second change in capacitance at the first plurality of electrodes, and wherein the first and second pluralities of electrodes are formed substantially in a third plane that is disposed between the first plane and the second plane, the third plane separated from the second plane by a gap.