Light sensors having dielectric optical coating filters

摘要

Light sensors including dielectric optical coatings to shape their spectral responses, and methods for fabricating such light sensors in a manner that accelerates lift-off processes and increases process margins, are described herein. In an embodiment, a light sensor includes a photodetector sensor region formed in a semiconductor substrate, a dielectric optical coating filter covering the photodetector sensor region, and dummy dielectric optical coating features beyond the photodetector sensor region, wherein the dummy dielectric optical features include one or more dummy corners, dummy islands and/or dummy rings. Alternatively, or additionally, the dielectric optical coating filter includes chamfered corners, which improves the thermal reliability of the dielectric optical coating.

主权项

1. A light sensor, comprising:
a photodetector sensor region formed in a semiconductor substrate; a dielectric optical coating filter covering the photodetector sensor region and covering a circumferential region of the semiconductor substrate that surrounds the photodetector sensor region; and dummy dielectric optical coating features beyond the photodetector sensor region, wherein the dummy dielectric optical coating features include one or more dummy corners, dummy islands and/or dummy rings.