Laser ablation method and apparatus having a feedback loop and control unit

摘要

A laser ablation method and apparatus uses a laser device to generate a pulsed laser using a laser device and to project the pulsed laser onto an ablation target to be ablated. A probe is then used to measure an indicative property of the ablation target or of the pulsed laser projected on the ablation target. A control loop is used to optimize ablation effect by generating a feedback signal according to the measured indicative property, sending the feedback signal to a control unit, and adjusting an output parameter of the pulsed laser according to the feedback signal. The measured indicative property may be a size of the laser beam spot or a material composition. The ablation, the feedback and the adjustment may be performed dynamically.

主权项

1. A laser ablation method comprising:
generating an ultrashort pulsed laser using a laser device; projecting the ultrashort pulsed laser onto an ablation target to be ablated; measuring an indicative property of the ablation spot-size; generating a feedback signal according to the measured indicative property; feeding the feedback signal to a control unit; and adjusting an output parameter of the ultrashort pulsed laser according to the feedback signal to optimize ablation effect.