Bending vibration piece, method for manufacturing the same and electronic device

摘要

A double-side tuning fork-type bending vibration piece having a basal part, a pair of drive vibration arms, a pair of detection vibration arms, drive electrodes and detection electrodes includes adjustment films of a metallic material or the like formed in connecting areas between the vibration arms and the basal part. The adjustment films are formed in such a way as to cover an area of tapered portions formed in connecting parts between the drive vibration arms and the basal part, an area of the basal part near the tapered portions and an area of the drive vibration arms. While monitoring a detection current outputted from the detection electrodes when the drive vibration arms are excited in driving mode, the adjustment films are partly deleted by laser irradiation so that the detection current becomes 0.

主权项

1. A bending vibration piece comprising:
a basal part; a vibration arm extending from the basal part, the vibration arm having a surface; an excitation electrode for exciting the vibration arm; and an adjustment film formed in a connecting area between the vibration arm and the basal part for adjusting distribution of internal stress generated by vibration when the vibration arm is excited, wherein at least a part of the adjustment film is formed on the surface of the vibration arm from one edge to the other edge of the surface, and a plurality of film vacant spots are formed in the adjustment film.