Test apparatus having a probe card and connector mechanism

摘要

A test apparatus for testing a semiconductor device includes a circuit board having a contact pattern on one side and an opening therethrough, and a probe card supporting a probe needle array. The probe needle array is insertable into the opening of the circuit board and is configured to probe a device under test. The probe needle array is in electrical contact with the contact pattern of the circuit board, to allow signals through the probe card and circuit board to a test equipment. A holder supports the probe card and other probe cards. The holder has multiple sides, each of which is supportable of a probe card having a probe needle array. The holder is rotatable to manipulate and position the probe needle arrays of the probe cards relative to a device under test. The holder allows disconnection and replacement of the probe needle arrays from the holder.

主权项

1. A test apparatus for testing a semiconductor device comprising:
a circuit board having a contact pattern on one side and an opening therethrough; a probe card supporting a probe needle array, the probe needle array is insertable into the opening of the circuit board, the probe needle array configured to probe a device under test and being in electrical contact with the contact pattern of the circuit board, such that the electrical contact of the probe needle array with the contact pattern of the circuit board allows signals through the probe card and circuit board to a test equipment; and a holder, the holder consisting of a configuration to support the probe card and three other probe cards, the three other probe cards each having a probe needle array, the holder comprises sides, each of which is supportable of the probe card and the three other probe cards, the holder is rotatable about an axis that does not intersect the probe card and the three other probe cards to manipulate and position the probe needle arrays of the probe card and the three other probe cards relative to a device under test, wherein the holder is configured to allow disconnection of the probe needle arrays of the probe card and the three other probe cards from the holder and to allow replacement thereof.