发明名称 |
Method of forming multi-layer graphene |
摘要 |
A method of forming a multi-layer graphene includes forming a stack of a graphitizing metal catalyst layer and graphene by repeatedly performing a cycle of first forming the graphitizing metal catalyst layer on a substrate, and then forming the graphene on the graphitizing metal catalyst layer, and removing the graphitizing metal catalyst layer. |
申请公布号 |
US9023221(B2) |
申请公布日期 |
2015.05.05 |
申请号 |
US201213451775 |
申请日期 |
2012.04.20 |
申请人 |
Samsung Electronics Co., Ltd. |
发明人 |
Woo Yun-sung;Choi Jae-young;Choi Won-mook;Shin Hyeon-jin;Yoon Seon-mi |
分类号 |
B44C1/22;B32B37/02;H01L21/027;C01B31/02;C01B31/04;B82Y30/00;B82Y40/00 |
主分类号 |
B44C1/22 |
代理机构 |
Harness, Dickey & Pierce, P.L.C. |
代理人 |
Harness, Dickey & Pierce, P.L.C. |
主权项 |
1. A method of forming a multi-layer graphene, the method comprising:
forming a stack of a graphitizing metal catalyst layer and graphene by repeatedly performing a cycle of first forming the graphitizing metal catalyst layer on a substrate, and then forming the graphene on the graphitizing metal catalyst layer; and removing the graphitizing metal catalyst layer. |
地址 |
Gyeonggi-do KR |