发明名称 Method of forming multi-layer graphene
摘要 A method of forming a multi-layer graphene includes forming a stack of a graphitizing metal catalyst layer and graphene by repeatedly performing a cycle of first forming the graphitizing metal catalyst layer on a substrate, and then forming the graphene on the graphitizing metal catalyst layer, and removing the graphitizing metal catalyst layer.
申请公布号 US9023221(B2) 申请公布日期 2015.05.05
申请号 US201213451775 申请日期 2012.04.20
申请人 Samsung Electronics Co., Ltd. 发明人 Woo Yun-sung;Choi Jae-young;Choi Won-mook;Shin Hyeon-jin;Yoon Seon-mi
分类号 B44C1/22;B32B37/02;H01L21/027;C01B31/02;C01B31/04;B82Y30/00;B82Y40/00 主分类号 B44C1/22
代理机构 Harness, Dickey & Pierce, P.L.C. 代理人 Harness, Dickey & Pierce, P.L.C.
主权项 1. A method of forming a multi-layer graphene, the method comprising: forming a stack of a graphitizing metal catalyst layer and graphene by repeatedly performing a cycle of first forming the graphitizing metal catalyst layer on a substrate, and then forming the graphene on the graphitizing metal catalyst layer; and removing the graphitizing metal catalyst layer.
地址 Gyeonggi-do KR