Method of manufacturing laminate

摘要

A method of manufacturing a laminate including a substrate, a support, and a release layer, the method including a preliminary treatment process of increasing temperatures of the support carried into a reaction chamber and the inside of the reaction chamber by a plasma treatment, and a release layer forming process of supplying a source gas serving as the release layer into the reaction chamber after the preliminary treatment process to form the release layer on the support.

主权项

1. A method of manufacturing a laminate which includes a substrate, a light-transmitting support that supports the substrate, and a release layer which is provided between the substrate and the support and is configured to be transformed by absorbing light with which irradiation is performed through the support, the method comprising:
a preliminary treatment process of increasing temperatures of the support carried into a reaction chamber and the inside of the reaction chamber by a plasma treatment; and a release layer forming process of supplying a source gas serving as the release layer into the reaction chamber after the preliminary treatment process to form the release layer on the support.