Substrate processing system and substrate transferring method

摘要

A substrate processing system and substrate transferring method capable of transferring a substrate bi-directionally through the use of substrate transferring device provided between two rows of processing chambers arranged linearly, thereby improving the substrate-transferring efficiency, the substrate processing system includes a transfer chamber having at least one bi-directional substrate transferring device for bi-directionally transferring a substrate; and a plurality of processing chambers for applying a semiconductor-manufacturing process to the substrate, wherein the plurality of processing chambers are linearly arranged along two rows confronting each other, and the transfer chamber is interposed between the two rows of the processing chambers, wherein the bi-directional substrate transferring device have a moving unit inside the transfer chamber, and horizontally moved by a linear motor; and a bi-directional substrate transferring unit in the moving unit, the bi-directional substrate transferring unit transferring the substrate to the processing chamber through a bi-directional sliding movement.

主权项

1. A substrate processing system comprising:
a transfer chamber having at least one bi-directional substrate transferring device configured to transfer a substrate in either of two directions; and a plurality of processing chambers applying a semiconductor-manufacturing process to the substrate, wherein the plurality of processing chambers are linearly arranged along two rows confronting each other, and the transfer chamber is between the two rows of the processing chambers, wherein the at least one bi-directional substrate transferring device comprises:
a moving unit inside the transfer chamber, configured to move horizontally; anda bi-directional substrate transferring unit on the moving unit, the bi-directional substrate transferring unit transferring the substrate to one of the processing chambers by sliding in either of the two directions, comprising:
a base frame on the moving unit;a fork frame on the base frame, the fork frame having a first support frame, a plurality of sidewall supporters along an edge of the first support frame, and a second support frame confronting the first support frame and in the plurality of sidewall supporters;first and second bi-directional sliding forks in the fork frame, the first and second bi-directional sliding forks comprising a plurality of sliding members configured to transfer the substrate to a first one of the processing chambers by linearly extending or retracting in a first one of the two directions and to a second one of the processing chambers by linearly extending or retracting in another one of the two directions; anda fork lift at a lateral side of the fork frame, the fork lift lifting or lowering the first support frame of the fork frame, wherein the fork lift comprises:
first and second lift supporters vertical to the base frame;first and second lifting units respectively adjacent to inner lateral sides of the first and second lift supporters;a first frame lifting member between the first lift supporter and the first lifting unit, the first frame lifting member lifting or lowering the fork frame by driving the first lifting unit;a second frame lifting member between the second lift supporter and the second lifting unit, the second frame lifting member lifting or lowering the fork frame by driving the second lifting unit; andan interlock shaft between the first and second lifting units, the interlock shaft interlocking the first and second lifting members.