Actuator including magnet for a projection exposure system and projection exposure system including a magnet

摘要

The present disclosure relates to an actuator for projection exposure systems that include a magnet. The magnet is encapsulated and/or supported in a magnet holding plate that is produced by microtechnical production methods so that a moving manipulator surface is held in the magnet holding plate via monolithic or bonded connections without additional connecting material so that there is a secure connection.

主权项

1. A projection exposure system, comprising:
an actuator for a mirror of a micromirror array, the actuator comprising a completely encapsulated magnet; a magnet holding plate; and a manipulator having a surface at least partially held in the magnet holding plate via a connection selected from the group consisting of a monolithic connection and a connection bonded with material continuity without additional connection material, wherein:
the magnet is encapsulated by a capsule housing that is a component selected from the group consisting of a monolithic component and a component bonded with material continuity of at least one of the magnet holding plate and the manipulator; andthe projection exposure system is a microlithography projection exposure system.