Liquid ejecting head, liquid ejecting apparatus, piezoelectric element, and method for manufacturing piezoelectric element

摘要

A flow channel substrate includes pressure chambers, and the pressure chambers communicate with nozzle openings. Piezoelectric elements located on either side of the flow channel substrate include a first electrode, a piezoelectric layer, and a second electrode. The piezoelectric layer contains lead, titanium, and zirconium. The second electrode includes a first layer on the piezoelectric layer side and a second layer on the side of the first layer opposite the piezoelectric layer. The second electrode also includes projections. The projections are aggregates of the lead originating in the piezoelectric layer, and the projections stick out of the surface of the second electrode opposite the piezoelectric layer.

主权项

1. A liquid ejecting head comprising:
a flow channel substrate, wherein the flow channel substrate includes a pressure chamber that communicates with a nozzle opening; and a piezoelectric element on either side of the flow channel substrate, wherein the piezoelectric element includes a first electrode, a piezoelectric layer, and a second electrode, and wherein the piezoelectric layer contains lead, titanium, and zirconium, wherein the second electrode includes a first layer formed on a piezoelectric layer side and a second layer formed on a side of the first layer opposite the piezoelectric layer, and wherein the second electrode includes a plurality of projections that are aggregates of the lead originating in the piezoelectric layer, the projections sticking out of a surface of the second electrode opposite the piezoelectric layer.