Method for producing substrate having concavity and convexity structure and method for producing organic EL element using the same

摘要

A method for producing a substrate having an irregular concave and convex surface for scattering light includes: manufacturing a substrate having the irregular concave and convex surface; irradiating the concave and convex surface of the manufactured substrate with inspection light from a direction oblique to a normal direction and detecting returning light of the inspection light returned from the concave and convex surface by a light-receiving element provided in the normal direction of the concave and convex surface; and judging unevenness of luminance of the concave and convex surface by an image processing device based on light intensity of the returning light received. An organic EL element which includes a diffraction-grating substrate having an irregular concave and convex surface is produced with a high throughput.

主权项

1. A method for producing a substrate laving an irregular concave and convex surface for scattering light, comprising:
manufacturing the substrate having the irregular concave and convex surface; irradiating the concave and convex surface of the manufactured substrate, which is arranged on a stage formed of a pair of blocks arranged on a floor surface at a predetermined distance, with inspection light from a direction oblique to a normal direction of the concave and convex surface by use of a pair of light sources which is arranged obliquely above the stage at positions symmetrical with the center of the stage, and detecting a returning light of the inspection light returned from the concave and convex surface by an imaging element, which is provided in the normal direction of the concave and convex surface and is arranged above the center of the stage at a predetermined distance from the stage; and judging unevenness of luminance of the concave and convex surface based on light intensity of the received returning light by use of an image processing device connected to the imaging element; wherein an incident angle of the inspection light to the concave and convex surface is fixed as a predetermined angle while irradiating the inspection light and detecting the returning light.