发明名称 |
Dielectric reliability assessment for advanced semiconductors |
摘要 |
Embodiments relate to methods, computer systems and computer program products for performing a dielectric reliability assessment for an advanced semiconductor. Embodiments include receiving data associated with a test of a macro of the advanced semiconductor to a point of dielectric breakdown. Embodiments also include scaling the data for the macro down to a reference area and extracting a parameter for a Weibull distribution from the scaled down data for the reference area. Embodiments further include deriving a cluster factor (α) from the scaled down data for the reference area and projecting a failure rate for a larger area of the advanced semiconductor based on the extracted parameter, the cluster factor and the recorded data associated with the dielectric breakdown of the macro. |
申请公布号 |
US9026981(B2) |
申请公布日期 |
2015.05.05 |
申请号 |
US201414308835 |
申请日期 |
2014.06.19 |
申请人 |
International Business Machines Corporation |
发明人 |
Li Baozhen;Stathis James H.;Wu Ernest Y. |
分类号 |
G06F11/22;G06F17/50 |
主分类号 |
G06F11/22 |
代理机构 |
Cantor Colburn LLP |
代理人 |
Cantor Colburn LLP ;Ivers Catherine |
主权项 |
1. A computer implemented method for performing a dielectric reliability assessment for an advanced semiconductor, the method comprising:
receiving data associated with a test of a macro of the advanced semiconductor to a point of dielectric breakdown; scaling, by a processor, the data for the macro down to a reference area; extracting a parameter for a Weibull distribution from the scaled down data for the reference area; deriving a cluster factor (α) from the scaled down data for the reference area; and projecting a failure rate for a larger area of the advanced semiconductor based on the extracted parameter, the cluster factor and the recorded data associated with the dielectric breakdown of the macro, wherein the parameter include a Weibull shape factor (β) and scale factor (τ) and wherein the Weibull shape factor (β), the scale factor (τ) and the clustering factor (α) are extracted according to:F=1-(1+1α(tτ)β)-α. |
地址 |
Armonk NY US |