Microscope apparatus

摘要

The present invention can realize stable focus tracking in the AF control of a microscope by calculating an evaluation function based on a light intensity signal received in two regions and adjusting the slope of the evaluation function to be constant.

主权项

1. A microscope apparatus including a plurality of objective lenses provided on an optical path in a switchable manner, an observation optical system for irradiating a sample mounted on a movable stage with visible light emitted from an illumination light source through one of the plurality of objective lenses, which is provided on the optical path, and for observing observation light reflected from the sample, and a focusing optical system for irradiating the sample with infrared light emitted from an autofocus light source through the one of the plurality of objective lenses, comprising:
a photoreceiver unit to receive the reflected infrared light; an in-focus position adjusting unit to adjust an in-focus position of the sample based on a light intensity signal of the infrared light received by the photoreceiver unit; an evaluation function calculation unit to calculate an evaluation function by using the light intensity signal of the infrared light received by the photoreceiver unit; an aperture stop to change an aperture diameter of the infrared light emitted from the autofocus light source; and an adjustment unit to adjust the aperture diameter of the aperture stop based on a position of a correction lens group arranged on the optical path of the focusing optical system.