Epitaxial structure

摘要

An epitaxial structure is provided. The epitaxial structure includes a substrate, an epitaxial layer and a carbon nanotube layer. The epitaxial layer is located on the substrate. The carbon nanotube layer is located between the substrate and the epitaxial layer. The carbon nanotube layer can be a carbon nanotube film drawn from a carbon nanotube array and including a plurality of successive and oriented carbon nanotubes joined end-to-end by van der Waals attractive force therebetween.

主权项

1. An epitaxial structure, comprising:
a substrate; an epitaxial layer located on the substrate; and a carbon nanotube layer located between the substrate and the epitaxial layer, wherein the carbon nanotube layer is an integral structure and comprises a plurality of carbon nanotubes joined end to end by van der Waals attractive force therebetween and extending along a direction substantially parallel to the substrate; the epitaxial layer defines a plurality of caves adjacent to and oriented to the substrate, and each of the plurality of caves encloses a portion of the plurality of carbon nanotubes therein and comprises an inner wall spaced apart from the portion of the plurality of carbon nanotubes enclosed therein; and space between the inner wall of each of the plurality of caves and the portion of the plurality of carbon nanotubes therein is filled with oxygen gas or air.