Oscillation type inertia force sensor

摘要

An inertia force sensor that shortens a time from power activation until inertia force can be detected includes an oscillator, an oscillation circuit unit, and a detection circuit unit. The oscillation circuit unit functions as a closed loop self oscillation circuit with the oscillator as a resonant element, and includes a CV conversion circuit converting a monitor signal based on electrostatic capacitance according to an oscillating state of oscillator into a monitor signal based on a voltage corresponding to an amount in change of the electrostatic capacitance, and an automatic gain control circuit controlling gain based on the monitor signal converted at the CV conversion circuit to generate a driving signal, and supplying the driving signal to the oscillator. The CV conversion circuit includes an amplifier that amplifies a monitor signal with an amplification factor for a predetermined period after power activation.

主权项

1. An oscillation type inertia force sensor comprising:
an oscillator that is used to detect inertia force; an oscillation circuit unit that supplies a driving signal to the oscillator; and a detection circuit unit that detects inertia force of the oscillator; wherein the oscillation circuit unit is a self oscillation circuit of a closed loop with the oscillator defining a resonant element, and the oscillation circuit unit includes:
a signal conversion circuit that converts a monitor signal based on electrostatic capacitance according to an oscillating state of the oscillator into a monitor signal based on a voltage corresponding to an amount of change of the electrostatic capacitance; andan automatic gain control circuit that amplifies the monitor signal converted at the signal conversion circuit with a gain controlled by a control signal to generate the driving signal, and that supplies the driving signal to the oscillator; whereinthe automatic gain control circuit generates the control signal so that an amplitude of the monitor signal converted at the signal conversion circuit is constant;the signal conversion circuit includes:
an operational amplifier that receives the monitor signal based on electrostatic capacitance and outputs the converted monitor signal to the automatic gain control circuit;a first feedback capacitor;a second feedback capacitor connected in parallel to the first feedback capacitor; anda switch that switches connection and disconnection between each of the first and second feedback capacitors and the operational amplifier; andthe signal conversion circuit is configured to:
connect the operational amplifier to the first feedback capacitor and disconnect the operational amplifier from the second feedback capacitor via the switch for a period determined based on a change of the control signal from power activation;connect the operational amplifier to at least the second feedback capacitor via the switch after the elapse of the determined period; andoutput, for the determined period, the converted monitor signal which is amplified with an amplification factor greater than that after the elapse of the determined period.