Method for fabricating a planar micro-tube discharger structure

摘要

A method for fabricating a semiconductor-based planar micro-tube discharger structure is provided, including the steps of forming on a substrate two patterned electrodes separated by a gap and at least one separating block arranged in the gap, forming an insulating layer over the patterned electrodes and the separating block, and filling the insulating layer into the gap. At least two discharge paths are formed. The method can fabricate a plurality of discharge paths in a semiconductor structure, the structure having very high reliability and reusability.

主权项

1. A method for fabricating a planar micro-tube discharger structure, comprising steps:
forming on a substrate two patterned electrodes separated by a gap and at least one separating block arranged in said gap; and forming a first insulating layer over said patterned electrodes and said separating block and filling said first insulating layer into said gap to create at least two discharge paths interconnecting said patterned electrodes.