APPARATUS FOR MEASURING NON-CONTACT AND METHOD FOR COMPENSATING ERROR THEREOF

摘要

The invention represents an apparatus for measuring non-contact and a method for compensating errors. The invention includes: a step of multi-unit modules formed in lines and rows with intervals; a step of arranging a plurality of unit modules in a row and a column with intervals from each other and placing a spheric array plate with the unit modules of an equal height on the top surface of an X-Y stage; a step of storing information on a distance between unit modules and information on location of X, Y and Z values of each unit module as a standard image by measuring the spheric array plate using a measuring device; a step of calculating the distance error ratio of each existing array plate by comparing the existing array plate location distance with the standard image, using a laser scanner, and creating corrected separation distance information and location-coordinate information for each location reflecting the distance error; and a step of measuring the distance and location coordinate of each subject location based on the corrected separation distance information and location-coordinate information, using the laser scanner.