APPARATUS FOR CONCENTRATING AND PYROLYZING SULFUR HEXAFLUORIDE

摘要

The present invention can concentrate and pyrolyze low concentration of SF6 into high concentration, which is contained in exhaust gas discharged from a clean room for an application process of a semiconductor, a display, and a solar panel by using a separation film, thereby improving processing efficiency and saving energy. In particular, the present invention can pressurize the exhaust gas supplied to the separation film while drifting or swirling is prevented from being generated inside the clean room, thereby reducing the size of a separation film module and improving the processing efficiency. An apparatus for concentrating and pyrolyzing sulfur hexafluoride, equipped with a blower and a pressure pump of the present invention comprises: a first buffer tank which is installed at the front end of the blower, and prevents swirling from being generated inside the clean room; a second buffer tank which is installed between the blower and the pressure pump; and a third buffer tank which is installed at the rear end of the pressure pump, and connected with the second buffer tank through a return line.