感光性树脂组成物、感光性元件、感光性树脂组成物的硬化物、半导体装置及抗蚀剂图案的形成方法;PHOTOSENSITIVE RESIN COMPOSITION, PHOTOSENSITIVE DEVICE, CURED PRODUCT OF PHOTOSENSITIVE RESIN COMPOSITION, SEMICONDUTOR DEVICE AND METHOD FOR FORMING RESIST PATTERN

摘要

一种感光性树脂组成物，其含有：(A)成分：具有酚性羟基的树脂；(B)成分：具有2个以上选自丙烯醯氧基、甲基丙烯醯氧基、缩水甘油氧基及羟基中的1种以上官能基的脂肪族化合物；(C)成分：光感应性酸产生剂；以及(D)成分：平均粒径为100nm以下的无机填料。; (B) component: an aliphatic compound having two or more functional groups, which are one or more functional groups selected from of an acryloyloxy group, a methacryloyloxy group, a glycidyloxy group and a hydroxyl group; (C) component: a photosensitive acid-generator; and (D) component: an inorganic filler with an average particle size of 100 nm or less.