静电容量感测器、检测系统及机器人系统;STATIC CAPACITANCE SENSOR, DETECTION SYSTEM AND ROBOT SYSTEM

摘要

本发明系提供简单的构造且能达成小型化之静电容量感测器、检测系统、及机器人系统。;检测系统1-1系具备静电容量感测器2、旋转角度演算部3、以及偏移量演算部4。静电容量感测器2系具有基材20、保护电极21、吸附电极22、4个第1电极23、以及2对第2电极对24、25。旋转角度演算部3系根据第1电极23和工件W的重叠部分的静电容量之和，而演算来自工件W的初期位置之旋转角度θ。偏移量演算部4系根据第2电极对24、25和工件W的重叠部分的静电容量之变化、以及来自旋转角度演算部3之旋转角度θ，以求得来自工件W的初期位置之x轴方向、往y轴方向的偏移量δ x、δ y。 This invention provides a static capacitance sensor having a simple construction which can be miniaturized, a detection system and a robot system. The detection system 1-1 has a static capacitance sensor 2, a rotation angle computing unit 3, and position offset computing unit 4. The static capacitance sensor 2 has a substrate 20, a guard electrode 21, a drawing electrode 22, four first electrodes 23 and two pairs of second electrode pairs 24, 25. The rotation angle computing unit 3 computes a rotation angle θ from an initial position of work w according to the sum of the static capacitance of overlapping parts of the first electrode 23 and work W. The position offset computing unit 4 computes the position from an initial position of work w, δ x in x axis direction, and δ