| 摘要 |
PROBLEM TO BE SOLVED: To allow for arrangement of the nozzle, for supplying the heat treatment gas to a processed object, closer to a processed object in a heat treatment apparatus.SOLUTION: A heat treatment apparatus 1 has an outer tube 4, a boat 11, a closing member 14, and a gas supply device 10. The boat 11 holds a processed object 100, and can enter the outer tube 4 or exit therefrom. The closing member 14 is provided for closing the lower end 4b of the outer tube, and can move in the vertical direction X1 accompany with the boat 11. The gas supply device 10 supplies the heat treatment gas to the processed object 100 in the outer tube 4. The movable section 28 of the gas supply device 10 can move in the vertical direction X1 accompany with the closing member 14. The nozzle sections 37, 38 of the movable section 28 supply the heat treatment gas to the processed object 100. |
