发明名称 半導体装置の製造方法及び半導体装置
摘要 A method of manufacturing a semiconductor device comprises a mounting step of mounting a semiconductor element having an Au—Sn layer on a substrate, wherein the mounting step includes a paste supplying step of supplying an Ag paste having an Ag nanoparticle onto the substrate, a device mounting step of mounting a side of the Au—Sn layer of the semiconductor element on the Ag paste, and a bonding step of alloying the Au—Sn layer and the Ag paste to bond the semiconductor element to the substrate, wherein the Au—Sn layer has a content rate of Au of 50 at % to 85 at %.
申请公布号 JP5708512(B2) 申请公布日期 2015.04.30
申请号 JP20120016268 申请日期 2012.01.30
申请人 豊田合成株式会社 发明人 下西 正太;田嶌 博幸;土屋 陽祐;仙石 昌
分类号 H01L21/52 主分类号 H01L21/52
代理机构 代理人
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