| 摘要 |
<P>PROBLEM TO BE SOLVED: To simplify the configuration of a high frequency power supply device for converting DC voltage into high frequency AC voltage by an inverter circuit to supply the high frequency AC voltage to a load. <P>SOLUTION: In the high frequency power supply device including an inverter circuit 3 for converting DC power generated by an DC power supply part 20 into AC power, and a transformer 4 in which an output of the inverter circuit is inputted to a primary side to supply high frequency power to a load 7 from a secondary side of the transformer, a phase difference detecting part 11 for detecting a phase difference between output current and output voltage of the inverter circuit 3, and a power detecting part 10 for detecting high frequency power to be given to the load are provided, DC voltage to be inputted to the inverter circuit 3 is made to be at a constant level, and the output frequency of the inverter circuit 3 is changed within the range in which the phase of output current of the inverter circuit to output voltage can be maintained in a lagging phase state to thereby perform control that approximates the high frequency power to be given to the load to a set value or maintains the high frequency power within an allowable range. <P>COPYRIGHT: (C)2012,JPO&INPIT |
