Particle Detector and Method for Producing Such a Detector

摘要

The invention relates to a particle detector including a substrate made of a semiconductor material, in which at least one through-cavity is formed, defined by an input section and an output section, wherein the input section thereof is to be connected to an airflow source, the substrate supporting: an optical means including at least one laser source, and at least one waveguide connected to the at least one laser source and leading into the vicinity of the output section of the cavity; and a photodetector located near the output section of the cavity and offset relative to the optical axis of the optical means.

主权项

1. A particle detector comprising a substrate in which at least one through-cavity, delimited by an entry cross section and an exit cross section, is formed, the entry cross section being configured to be connected to a source of an air flow, said substrate supporting:
optical device comprising at least one laser source and at least one waveguide, which is connected to said at least one laser source and the end of which is located in proximity to the exit cross section of said cavity, and at least one photodetector located in proximity to the exit cross section of said cavity and offset with respect to the optical axis of said optical means, in order to detect the scattered light.