FLEXIBLE PERMATION BARRIER SYSTEM DEPOSITED IN A SINGLE PROCESS AND HAVING ULTRALOW PERMEABILITY AND LOW MECHANICAL STRESS OVER ITS SERVICE LIFE

摘要

Permeation barrier films and methods of manufacturing the same are provided, in which a barrier film layer having multiple sub-layers is deposited in a single deposition process. The barrier film layer may include multiple sub-layers that are fabricated by altering a process parameter of a single deposition technique.