发明名称 プラズマ放電の検出、絶縁および防止のためのシステムおよび方法
摘要 <p>A device for use with an RF generating source, a first electrode, a second electrode and an element. The RF generating source is operable to provide an RF signal to the first electrode and thereby create a potential between the first electrode and the second electrode. The device comprises a connecting portion and a current sink. The connecting portion is operable to electrically connect to one of the first electrode, the second electrode and an element. The current sink is in electrical connection with the connection portion and a path to ground. The current sink comprises a voltage threshold. The current sink is operable to conduct current from the connecting portion to ground when a voltage on the electrically connected one of the first electrode, the second electrode and the element is greater than the voltage threshold.</p>
申请公布号 JP5709863(B2) 申请公布日期 2015.04.30
申请号 JP20120521688 申请日期 2010.07.16
申请人 发明人
分类号 H01L21/3065;H01L21/31;H05H1/46 主分类号 H01L21/3065
代理机构 代理人
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