摘要 |
Vacuum cleaning apparatus (1, 51) includes a vapor generating member (8, 8a, 53, 53a) for generating vapor of a petroleum-based solvent, a cleaning chamber (2) allowing a workpiece to be cleaned under reduced pressure by the vapor fed from the vapor generating member, a condensing chamber (21) that is connected to the cleaning chamber and is maintained in a depressurized state, a temperature maintaining member (22) that maintains the condensing chamber at a lower temperature than the cleaning chamber, and an opening/closing member (20) that provides or cuts off communication between the condensing chamber and the cleaning chamber. |