发明名称 真空洗浄装置および真空洗浄方法
摘要 Vacuum cleaning apparatus (1, 51) includes a vapor generating member (8, 8a, 53, 53a) for generating vapor of a petroleum-based solvent, a cleaning chamber (2) allowing a workpiece to be cleaned under reduced pressure by the vapor fed from the vapor generating member, a condensing chamber (21) that is connected to the cleaning chamber and is maintained in a depressurized state, a temperature maintaining member (22) that maintains the condensing chamber at a lower temperature than the cleaning chamber, and an opening/closing member (20) that provides or cuts off communication between the condensing chamber and the cleaning chamber.
申请公布号 JP5707527(B2) 申请公布日期 2015.04.30
申请号 JP20140118204 申请日期 2014.06.06
申请人 株式会社IHI;株式会社IHI機械システム 发明人 平本 昇;三塚 正敏;小西 博之
分类号 B08B3/00;B08B3/04;B08B3/08 主分类号 B08B3/00
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