| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a measurement system which measures height of an object by optical metrology.SOLUTION: Methods and systems 100 include: a first light source 110 producing a first light beam 120; a second light source 140 producing a second light beam 150 into a detection area; and at least one image processing system 160 comprising one or more light detectors 162 adapted to remotely sense the first and second light beam and generate one or more output signals indicative of one or more patterns produced on a top of an object by the first and second light beam, and one or more processors 164 running computer executable instructions to receive the output signal and determine height of the object by analyzing location of the first light beam relative to the second light beam in the one or more pattern. The first light beam 120 and the second light beam 150 collinearly overlap at a predetermined distance above an inspection base 180.</p> |
