发明名称 PRECISION CLAMP
摘要 A clamp for selectively inhibiting movement of a first object relative to a second object includes (i) a first clamp component coupled to the first object; (ii) a second clamp component coupled to the second object; and (iii) a fluid source that directs a fluid to the second clamp component to create a fluid bearing between the first clamp component and the second clamp component that allows for movement of the first clamp component relative to the second clamp component, and wherein the fluid source directs less fluid to the second clamp component to inhibit relative movement.
申请公布号 US2015115513(A1) 申请公布日期 2015.04.30
申请号 US201414526326 申请日期 2014.10.28
申请人 NIKON CORPORATION 发明人 Hashemi Fardad A.;Bow Travis D.;Chang Patrick
分类号 B25B5/16 主分类号 B25B5/16
代理机构 代理人
主权项 1. A clamp for selectively inhibiting relative movement between a first object and a second object, the clamp comprising: a clamp assembly including a first clamp component that is coupled to the first object, and a second clamp component that is coupled to the second object, the clamp assembly being movable between a clamped configuration in which relative movement of the clamp components is inhibited and an unclamped configuration that allows for relative movement between the clamp components; and a fluid source that selectively directs a fluid to the clamp assembly to selectively generate a fluid bearing that urges the clamp assembly from the clamped configuration to the unclamped configuration.
地址 Tokyo JP