发明名称 OPTOMECHANICAL DEVICE WITH MECHANICAL ELEMENTS AND OPTICAL FILTERS FOR ACTUATING AND/OR DETECTING THE MOVEMENT OF THE ELEMENTS
摘要 The device according to the invention comprises: a support (30), and thereon: an array (32) of mechanical elements (34) that are anchored to the support and capable of moving with respect thereto, and an actuating and/or detection device for actuating the elements and/or detecting the movement of the the elements or frequency variations of the movement. According to the invention, the actuating and/or detection device comprises an array of optical filters (42). Each filter resonates at a particular wavelength and is coupled to one of the elements (34). The actuating and/or detecting device is positioned in the vicinity of all or some of the elements, between the latter and the support. The optical filters are fixed with respect to the support and the mechanical elements and the optical filters are superimposed.
申请公布号 WO2015059109(A1) 申请公布日期 2015.04.30
申请号 WO2014EP72483 申请日期 2014.10.21
申请人 COMMISSARIAT À L'ÉNERGIE ATOMIQUE ET AUX ÉNERGIESALTERNATIVES;CALIFORNIA INSTITUTE OF TECHNOLOGY 发明人 DURAFFOURG, LAURENT;HENTZ, SÉBASTIEN;ROUKES, MICKAEL LEE
分类号 G02B6/12;G01H9/00;G02B6/293;G02B6/35 主分类号 G02B6/12
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