| 摘要 |
<p>A sintered body which is composed of indium (In), titanium (Ti) or chromium (Cr), zinc (Zn) or tin (Sn), and oxygen (O), which comprises 2 to 65 mol% of In as In2O3 and 2 to 65 mol% of Ti or Cr as TiO2 or Cr2O3 respectively, and which when an atom ratio of In is A (at%), atom ratio of Ti or Cr is B (at%), and atom ratio of Zn or Sn is C (at%), satisfies 0.5≤A/B≤5 and 0<C/(A+B)<10. A transparent thin film with a high refractive index can be formed which has a low bulk resistance and is capable of DC sputtering.</p> |
