发明名称 X-RAY GENERATION DEVICE AND X-RAY GENERATION METHOD
摘要 An X-ray generation device is provided with an electron gun unit for emitting an electron beam, and a target unit having a substrate comprised of diamond, and a target body comprised of a material for generating X-rays with incidence of the electron beam thereto and buried in close contact in the substrate. An outer diameter of the target body is in the range of 0.05 to 1 μm. An outer diameter of an irradiation field of the electron beam on the target unit is in the range of 1.1 to 2.5 times the outer diameter of the target body. The X-ray generation device irradiates the target body with the electron beam so that the target body is included in the irradiation field, thereby to generate X-rays from the target body.
申请公布号 US2015117616(A1) 申请公布日期 2015.04.30
申请号 US201314396417 申请日期 2013.03.15
申请人 HAMAMATSU PHOTONICS K.K. 发明人 Ishii Atsushi;Suyama Motohiro;Suzuki Naonobu;Yabushita Ryosuke
分类号 H05G1/52;H01J35/30;H01J35/08;H01J35/14 主分类号 H05G1/52
代理机构 代理人
主权项 1. An X-ray generation device comprising: an electron gun unit for emitting an electron beam; and a target unit having a substrate comprised of diamond, and a target body comprised of a material for generating X-rays with incidence of the electron beam thereto and buried in close contact in the substrate, wherein an outer diameter of the target body is in the range of 0.05 to 1 μm, wherein an outer diameter of an irradiation field of the electron beam on the target unit is in the range of 1.1 to 2.5 times the outer diameter of the target body, and wherein the target body is irradiated with the electron beam so that the target body is included in the irradiation field, whereby X-rays are generated from the target body.
地址 Hamamatsu-shi, Shizuoka JP