MAINTENANCE CARRIAGE FOR WAFER INSPECTION APPARATUS AND MAINTENANCE METHOD FOR WAFER INSPECTION APPARATUS

摘要

A maintenance carriage of a wafer inspection apparatus can easily unload a test head. A wafer inspection apparatus 10 includes a cell tower 12 in which cells 11 are arranged at four levels, and each of the cells 11 accommodates a test head 15. At an outside of the cell tower 12, a maintenance carriage 27 is arranged. The maintenance carriage 27 includes a carriage base 29 configured to be moved through rollers 28; a test head case 31 configured to accommodate the test head 15; a lift device 30 provided uprightly from the carriage base 29 and configured to move up and down the test head case 31; and a horizontal position adjusting stage 35 provided between a lifter 34 of the lift device 30 and the test head case 31 and configured to move the test head case 31 horizontally with respect to the lifter 34.

主权项

1. A maintenance carriage for a wafer inspection apparatus in which test heads are arranged to be stacked at multiple levels, the maintenance carriage comprising:
a movable carriage base having wheels; a case configured to accommodate the test head; a lift device which is provided uprightly from the carriage base and configured to move the case up and down; and a horizontal position adjusting device which is provided between the lift device and the case and configured to horizontally move the case with respect to the lift device.