| 发明名称 |
Method and Apparatus for Adjusting Operating Parameters of a Vacuum Pump Arrangement |
| 摘要 |
A method for adjusting operating parameters of a vacuum pump arrangement includes determining characteristics of a gas flowing through the vacuum pump arrangement; and setting operating parameters of the vacuum pump arrangement based on the determined characteristics of the first gas. A controller can be configured to perform the method for adjusting the operating parameters of the vacuum pump arrangement in accordance with the characteristics of the gas. |
| 申请公布号 |
US2015114476(A1) |
申请公布日期 |
2015.04.30 |
| 申请号 |
US201314391607 |
申请日期 |
2013.04.23 |
| 申请人 |
EDWARDS LIMITED |
发明人 |
Turner Neil;Tattersall Jack Raymond |
| 分类号 |
F04C25/02;F04D27/00;F04C28/02 |
主分类号 |
F04C25/02 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A method of adjusting operating parameters of a vacuum pump arrangement, comprising:
determining characteristics of a first gas flowing through the vacuum pump arrangement; and setting operating parameters of the vacuum pump arrangement based on the determined characteristics of the first gas. |
| 地址 |
Crawley, West Sussex GB |
