| 摘要 |
The present invention addresses the problem of providing a pin transfer apparatus (5) having a reduced height (L1) of a transfer path (A) for a backup pin (81). The pin transfer apparatus (5) transfers the backup pin (81) that supports a substrate (B). The pin transfer apparatus (5) is provided with an attitude switching section (53) that switches attitude of the backup pin (81) between a first attitude, and a second attitude wherein the backup pin (81) is tilted such that the total length in the perpendicular direction is smaller than that in the first attitude. The pin transfer apparatus (5) transfers the backup pin (81) in the second attitude. |
