| 摘要 |
PROBLEM TO BE SOLVED: To provide a method for manufacturing a CZTS based thin film solar cell having high photoelectric conversion efficiency.SOLUTION: A CZTS based thin film solar cell is manufactured in such a way that a metal back electrode layer (2) is formed on a substrate (1), and a metal precursor film containing at least Cu, Zn and Sn is formed on the metal back electrode layer (2). Then, the substrate (1) with the metal precursor film formed thereon is processed in a furnace filled with selenium-containing gas to turn the metal precursor film into a selenide, and the metal precursor film now turned into a selenide is sulfurized by introducing sulfur- or sulfide-containing gas into the furnace to form a p-type CZTS based light absorption layer (3) containing selenium and sulfur. Thereafter, an n-type transparent film (5) is formed on the p-type CZTS based light absorption layer (3). |
