摘要 |
<p>PROBLEM TO BE SOLVED: To provide a transversal type surface acoustic wave (SAW) device, for realizing satisfactory frequency temperature characteristics.SOLUTION: A SAW device 10A uses a crystal substrate 30 of an Euler angle (-1°≤φ≤1°, 117°≤θ≤142°, 42.79°≤|ψ|≤49.57°), and has a groove 32 which is formed by recessing a substrate located between an input IDT 12A and output IDT 12B which excite a SAW of a stop band upper end mode and an electrode finger 18 which constitutes the input IDT 12A and the output IDT 12B, and satisfies 0.01λ≤G in a case where wavelength of the SAW is set toλ, and depth of the groove 32 is set to G, and the depth G of the groove 32 and a line occupancy ratioηsatisfy relation of -2.5×G/λ+0.675≤η≤-2.5×G/λ+0.775 in a case where the line occupancy ratio of the IDTs 12A and 12B is set toη.</p> |