发明名称 TRANSVERSAL TYPE SURFACE ACOUSTIC WAVE DEVICE, SURFACE ACOUSTIC WAVE OSCILLATOR, AND ELECTRONIC APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To provide a transversal type surface acoustic wave (SAW) device, for realizing satisfactory frequency temperature characteristics.SOLUTION: A SAW device 10A uses a crystal substrate 30 of an Euler angle (-1°≤φ≤1°, 117°≤θ≤142°, 42.79°≤|ψ|≤49.57°), and has a groove 32 which is formed by recessing a substrate located between an input IDT 12A and output IDT 12B which excite a SAW of a stop band upper end mode and an electrode finger 18 which constitutes the input IDT 12A and the output IDT 12B, and satisfies 0.01λ≤G in a case where wavelength of the SAW is set toλ, and depth of the groove 32 is set to G, and the depth G of the groove 32 and a line occupancy ratioηsatisfy relation of -2.5×G/λ+0.675≤η≤-2.5×G/λ+0.775 in a case where the line occupancy ratio of the IDTs 12A and 12B is set toη.</p>
申请公布号 JP2015084535(A) 申请公布日期 2015.04.30
申请号 JP20140238239 申请日期 2014.11.25
申请人 SEIKO EPSON CORP 发明人 YAMANAKA KUNIHITO
分类号 H03H9/145;H03H9/25;H03H9/64 主分类号 H03H9/145
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