Semiconductor Device Having a Locally Reinforced Metallization Structure and Method for Manufacturing Thereof

摘要

A method for forming a semiconductor device includes providing a semiconductor substrate having a first area and a second area. A first metal layer structure is formed which includes at least a first metal portion in the first area and a second metal portion in the second area. A plating mask is formed on the first metal layer structure to cover the second metal portion, and a second metal layer structure is plated on and in ohmic contact with the first metal portion of the first metal layer structure.

主权项

1. A method for manufacturing a semiconductor device, the method comprising:
providing a semiconductor substrate comprising an active area formed in the semiconductor substrate and an edge termination area formed in the semiconductor substrate and laterally surrounding the active area; forming a first metal layer structure on a first side of the semiconductor substrate, wherein the first metal layer structure comprises at least a lower metal layer extending from the active area to the edge termination area and at least an upper metal layer comprising at least a first metal portion in the active area and at least a second metal portion in the edge termination area; forming a plating mask on the first metal layer structure to cover the second metal portion while leaving at least a portion of the first metal portion uncovered; plating a second metal layer structure at least on and in ohmic contact with the first metal portion, wherein the plating mask covers the second metal portion during plating of the second metal layer structure; and etching the lower metal layer of the first metal layer structure using at least the upper metal layer as etching mask after plating the second metal layer structure; wherein the second metal layer structure, the first metal portion of the upper metal layer and a portion of the lower metal layer form together a common metallization structure in the active area of the semiconductor device.