ACCELERATION SENSOR

摘要

Embodiments of the invention provide an acceleration sensor, including a mass body part including a first mass body and a second mass body, flexible beams coupled with the first mass body, and a support part including first support parts, which are connected to the flexible beams and are disposed to face the second mass body, and second support parts, which are coupled with the first support parts. The mass body part, the flexible beams, and the support parts are configured of a first substrate and a second substrate coupled with each other so as to be stacked, and when the mass body part is excessively displaced, the second mass body contacts the first support parts to limit the displacement of the mass body part.

主权项

1. An acceleration sensor, comprising:
a mass body part comprising a first mass body and a second mass body; flexible beams coupled with the first mass body; and a support part comprising first support parts, which are connected to the flexible beams and are disposed to face the second mass body, and second support parts, which are coupled with the first support parts, wherein the mass body part, the flexible beams, and the support parts are configured of a first substrate and a second substrate, which are coupled with each other so as to be stacked, and wherein, when the mass body part is excessively displaced, the second mass body contacts the first support parts to limit the displacement of the mass body part.