| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To surely and easily detect a fiducial mark provided on a transparent substrate. <P>SOLUTION: When a mark detector detects a fiducial mark M based on image data of one side of a substrate 10 to be detected on which the fiducial mark is provided, with the one side illuminated with light, a colored translucent sheet 9b formed in a color selected from the group consisting of green, blue and black is disposed so as to be in contact with the other side of the substrate, and a colored opaque sheet 9a at least of which surface in contact with the sheet 9b is formed in a color of at least black or green is disposed on the side of the sheet 9b opposite to the side thereof in contact with the substrate 10. Under such a condition, the one side of the substrate 10 disposed so that the other side thereof is in contact with the sheet 9b is illuminated with red light L1 from an LED light source 21, and then an imaging part 22 capable of outputting monochromatic image data images the one side of the substrate 10, the mark detector finally detecting the mark M based on the monochromatic image data outputted from the imaging part 22. <P>COPYRIGHT: (C)2012,JPO&INPIT</p> |
