发明名称 マスクユニットおよび蒸着装置
摘要 <p>A mask unit is arranged such that at any location along an X direction with respect to openings (S) of a vapor deposition mask, the length of that portion of openings S which is uncovered by a beam portion totals a constant length along a Y direction in a plan view and that the beam portion has a part in contact with the vapor deposition mask which part does not bridge an opening of a frame portion along the Y direction but extends to cross the Y direction continuously or intermittently.</p>
申请公布号 JP5710843(B2) 申请公布日期 2015.04.30
申请号 JP20140524668 申请日期 2013.04.15
申请人 发明人
分类号 C23C14/04;C23C14/24;H01L51/50;H05B33/10 主分类号 C23C14/04
代理机构 代理人
主权项
地址