| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide a pressurizing technique capable of controlling mutual clearance of pressurized objects more accurately. <P>SOLUTION: A pressurizing equipment 1 is equipped with a stage 12, a head 22, a range finding sensor 33 and a piezoactuator 31, etc. The stage 12 and the head 22 are relatively movable in Z direction while countering separated in Z direction. Both objects to be pressurized 91 and 92 are set intervening between a pressurizing surface of stage 12 and a pressurizing surface of head 22. Both the objects to be pressurized 91 and 92 are arranged interposing a layer of flowable substance (thermosetting resin, etc.) in between. A mutual distance in Z direction of both the objects 91 and 92 is measured in a plurality of positions (e.g. three positions) within the plane parallel to XY plane by the range finding sensor 33, etc. Additionally, the pressurizing surface of stage 12 and the pressurizing surface of head 22 are moved relatively based on those measured results to that the mutual distances in the plurality of positions may respectively approach their target values. <P>COPYRIGHT: (C)2011,JPO&INPIT</p> |
