发明名称 |
THERMAL ENERGY DISSIPATION USING BACKSIDE THERMOELECTRIC DEVICES |
摘要 |
Embodiments of the present invention provide a semiconductor structure and method to dissipate heat generated by semiconductor devices by utilizing backside thermoelectric devices. In certain embodiments, the semiconductor structure comprises an electronic device formed on a first side of the semiconductor structure. The semiconductor structure also comprises a thermoelectric cooling device formed on a second side of the semiconductor structure in close proximity to a region of the semiconductor structure where heat dissipation is desired, wherein the thermoelectric cooling device includes a Peltier junction. In other embodiments, the method comprises forming an electronic device on a first side of a semiconductor structure. The method also comprises forming a thermoelectric cooling device on a second side of the semiconductor structure in close proximity to a region of the semiconductor structure where heat dissipation is desired, wherein the thermoelectric cooling device includes a Peltier junction. |
申请公布号 |
US2015115431(A1) |
申请公布日期 |
2015.04.30 |
申请号 |
US201314067507 |
申请日期 |
2013.10.30 |
申请人 |
International Business Machines Corporation |
发明人 |
Chadwick Nathaniel R.;Gambino Jeffrey P.;Peterson Kirk D. |
分类号 |
H01L23/38;H01L35/30;H01L35/34 |
主分类号 |
H01L23/38 |
代理机构 |
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代理人 |
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主权项 |
1. A semiconductor structure comprising:
an electronic device formed on a first side of the semiconductor structure; and a thermoelectric cooling device formed on a second side of the semiconductor structure in close proximity to a region of the semiconductor structure where heat dissipation is desired, wherein the thermoelectric cooling device includes a Peltier junction. |
地址 |
Armonk NY US |