| 发明名称 |
SCANNING TRANSMISSION ELECTRON MICROSCOPE SYSTEM, IMAGE PROCESSING METHOD, AND IMAGE PROCESSING APPARATUS |
| 摘要 |
A scanning transmission electron microscope system includes: an annular dark-field detector; an electron energy loss spectroscopic apparatus configured to acquire an electron energy loss spectroscopy spectrum of a first electron beam from the annular dark-field detector; and an image processing apparatus configured to generate a first STEM image based on an output signal from the annular dark-field detector and generate a second STEM image based on an integrated value of the electron energy loss spectroscopy spectrum. |
| 申请公布号 |
US2015115155(A1) |
申请公布日期 |
2015.04.30 |
| 申请号 |
US201414483522 |
申请日期 |
2014.09.11 |
| 申请人 |
FUJITSU LIMITED |
发明人 |
Yamazaki Takashi;Kotaka Yasutoshi |
| 分类号 |
H01J37/22;H01J37/28 |
主分类号 |
H01J37/22 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
1. A scanning transmission electron microscope system comprising:
an annular dark-field detector; an electron energy loss spectroscopic apparatus configured to acquire an electron energy loss spectroscopy spectrum of a first electron beam from the annular dark-field detector; and an image processing apparatus configured to generate a first STEM image based on an output signal from the annular dark-field detector and generate a second STEM image based on an integrated value of the electron energy loss spectroscopy spectrum. |
| 地址 |
Kawasaki-shi JP |
