发明名称 |
STACK MANUFACTURING APPARATUS |
摘要 |
<p>PROBLEM TO BE SOLVED: To provide a stack manufacturing apparatus with high mass productivity and to improve yield in the manufacturing of a stack.SOLUTION: The stack manufacturing apparatus includes a first supporting body supply unit which is configured to intermittently unroll a roll sheet-shaped first supporting body and includes one of a pair of tension applying devices capable of applying tension to the unrolled first supporting body; a first adhesive layer formation unit to which the unrolled first supporting body is supplied and which can form a first adhesive layer over the first supporting body at rest; a first bonding unit to which the first supporting body with the first adhesive layer formed thereover and a sheet-shaped member are supplied and which bonds the member onto the first supporting body at rest using the first adhesive layer, so that a first stack where the first supporting body, the first adhesive layer, and the sheet-shaped member are stacked in this order is formed; and a control unit which is configured to hold an end portion of the unrolled first supporting body and includes the other of the pair of tension applying devices.</p> |
申请公布号 |
JP2015083373(A) |
申请公布日期 |
2015.04.30 |
申请号 |
JP20140187212 |
申请日期 |
2014.09.16 |
申请人 |
SEMICONDUCTOR ENERGY LAB CO LTD |
发明人 |
HIRAKATA YOSHIHARU;SEO TETSUSHI |
分类号 |
B32B37/16;H01L51/50;H05B33/04;H05B33/10;H05B33/14 |
主分类号 |
B32B37/16 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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