发明名称 STACK MANUFACTURING APPARATUS
摘要 <p>PROBLEM TO BE SOLVED: To provide a stack manufacturing apparatus with high mass productivity and to improve yield in the manufacturing of a stack.SOLUTION: The stack manufacturing apparatus includes a first supporting body supply unit which is configured to intermittently unroll a roll sheet-shaped first supporting body and includes one of a pair of tension applying devices capable of applying tension to the unrolled first supporting body; a first adhesive layer formation unit to which the unrolled first supporting body is supplied and which can form a first adhesive layer over the first supporting body at rest; a first bonding unit to which the first supporting body with the first adhesive layer formed thereover and a sheet-shaped member are supplied and which bonds the member onto the first supporting body at rest using the first adhesive layer, so that a first stack where the first supporting body, the first adhesive layer, and the sheet-shaped member are stacked in this order is formed; and a control unit which is configured to hold an end portion of the unrolled first supporting body and includes the other of the pair of tension applying devices.</p>
申请公布号 JP2015083373(A) 申请公布日期 2015.04.30
申请号 JP20140187212 申请日期 2014.09.16
申请人 SEMICONDUCTOR ENERGY LAB CO LTD 发明人 HIRAKATA YOSHIHARU;SEO TETSUSHI
分类号 B32B37/16;H01L51/50;H05B33/04;H05B33/10;H05B33/14 主分类号 B32B37/16
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