SENSOR DEVICE, FORCE DETECTING DEVICE, ROBOT, ELECTRONIC COMPONENT CONVEYING APPARATUS, ELECTRONIC COMPONENT INSPECTING APPARATUS, AND COMPONENT MACHINING APPARATUS

摘要

A sensor device includes a charge output element including a plurality of piezoelectric bodies and an internal electrode formed between the piezoelectric bodies, a package that houses the charge output element, first conductive paste electrically connected to a plurality of the internal electrodes, and second conductive paste that electrically connects the first conductive paste and an output terminal and has a modulus of elasticity lower than a modulus of elasticity of the first conductive paste. A Young's modulus of the first conductive paste is equal to or higher than 3.4 GPa and equal to or lower than 5.0 GPa and a Young's modulus of the second conductive paste is equal to or higher than 0.1 GPa and equal to or lower than 0.2 GPa.

主权项

1. A sensor device comprising:
a plurality of piezoelectric bodies; an internal electrode formed between the plurality of piezoelectric bodies; a package including an output terminal and configured to house the piezoelectric bodies; a first conductive member electrically connected to a plurality of the internal electrodes; and a second conductive member configured to electrically connect the first conductive member and the output terminal and having a modulus of elasticity lower than a modulus of elasticity of the first conductive member.